self compensation meaning in English
自补偿
自动补偿
Examples
- Have been several key techniques of making dif - pressure sensors such as plane technics , minuteness engine machining , static sealing etc . in the paper in the intellectualized researching field there are two ways which are examine - form , curve simulanting , to carry out dif - pressure sensors non - linear self - emendating ; adopt the several curves approaching and curve simulating to achieve the aims of dif - pressure sensor error self compensation
论文首先讨论了差压传感器的设计原理，并对差压传感器中复合敏感芯片(差压、静压、温度)和整体结构进行了设计，还解决了差压传感器制作中的平面工艺、微机械加工、静电封接及真空充油等关键技术。 - Based on silicon - piezoresistive method , the paper first gives the theory of array silicon piezoresistive pressure , acceleration sensor , and the design of its incorporated chip , microstructure and out - circuit . several key techniques of making array silicon piezoresistive pressure , acceleration sensor such as 1c technic , mems ( silicon - silicon direct bonding , anodic bonding , anisotropic etching ) is also studied . minuteness engine machining , anode bonding etc . in the paper there are three ways which are examine - form , curve simulanting , to carry out sensors non - linear self - emendating ; adopt the several curves approaching and curve simulating to achieve the aims of sensor error self compensation , fusion technology etc . therefore , it providing referenced values of ways and directions for sensor system directing on
论文首先以硅压阻效应原理为基础，讨论了阵列式硅压力、加速度传感器的设计原理，并对阵列式硅压力、加速度传感器中集成敏感芯片(压力、加速度) 、总体结构和压力阵列的信号处理电路进行了设计，在阵列式硅压力、加速度传感器的研制中，还研究了半导体平面工艺、大规模集成电路技术、微机械加工技术(硅硅键合、静电封接、各向异性腐蚀)等关键技术的应用。